2025-1 Topic in Semiconductor Materials

Lecture 1 - Orientation [pdf]

Lecture 2 - Introduction [pdf]

Lecture 3 - Fabrication - oxidation [pdf]

Lecture 4 - Fabrication - photolithography [pdf]

Lecture 5 - Fabrication - etching [pdf]

Lecture 6 - Fabrication - etching continued [pdf]

Lecture 7 - Fabrication - diffusion [pdf]

Lecture 8 - Fabrication - Implantation [pdf]

Lecture 9 - Fabrication - Deposition [pdf]

Lecture 10 - Fabrication - Deposition continued [pdf]

Lecture 11 - Fabrication - Packaging [pdf]

Lecture 12 - 3D integration [pdf]

Lecture 13 - Mid-term review

Lecture 14 - 3D integration - exfoliation [pdf]

Lecture 15 - 3D integration - exfoliation continued [pdf]

Lecture 16 - 3D integration - continued [pdf]

Lecture 17 - 3D integration - continued [pdf]

Lecture 18 - 3D integration - continued [pdf]

Lecture 19 - 3D integration - continued [pdf]

Lecture 20 - 3D integration - continued [pdf]